Shape Memory Alloys and Polymers for MEMS/NEMS Applications: Review on Recent Findings and Challenges in Design, Preparation, and Characterization

Rapid progress in material science and nanotechnology has led to the development of shape memory alloys (SMA) polymers (SMP) based functional multilayered structures that, due their capability achieve properties not feasible by most natural materials, have attracted a significant attention from scientific community. These materials can sustain large deformations, which be recovered once appropriate value an external stimulus is applied. Moreover, SMAs SMPs reprogrammed meet several desired properties. As result, benefit unprecedented physical such as effect, superelasticity, displacement actuation, changeable mechanical properties, high energy density. They hold promises design advanced micro- nano-electro-mechanical systems (MEMS/NEMS). In this review, we discuss recent understanding fields SMPs. Particular will given existing challenges, critical issues, limitations, achievements preparation characterization NiTi-based thin films, heterostructures for MEMS/NEMS applications including both experimental computational approaches. Examples devices utilizing unique micropumps, microsensors or tunable metamaterial resonators are highlighted. addition, also introduce prospective future research directions applications.